METHOD FOR FORMING PLATED FILM, AND PLATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a plated film, which can form the plated film in the inner side of a fine hole without being hindered by air bubbles remaining in the inner side of the fine hole in plating treatment, and to provide a plating apparatus therefor. SOLUTION: The method for forming the plated film in the inner side of the fine hole of a workpiece 10a includes sequential steps of: immersing the workpiece 10a in a solution B17 having a smaller surface tension against the workpiece 10a than a solution A16 for use in the plating; and immersing the workpiece 10a in a plating bath to fill the inner side of the fine hole with the solution A16. COPYRIGHT: (C)2009,JPO&INPIT