,申请号JP19990117675-传众专利搜索

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发明名称
摘要
申请公布号	JP4234842(B2)	申请公布日期	2009.03.04
申请号	JP19990117675	申请日期	1999.04.26
申请人		发明人
分类号	C30B29/06;H01L21/208;H01L21/02	主分类号	C30B29/06
代理机构		代理人
主权项
地址

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