| 摘要 |
PROBLEM TO BE SOLVED: To improve the maintainability of a filter portion of a film forming apparatus for forming a protective film on a substrate.SOLUTION: A film forming apparatus includes a source portion that generates plasma by arc discharge, a film forming portion in which a film-formed material is arranged for irradiating the plasma generated in the source portion, and an induction portion that induces the plasma from the source portion to the film forming portion. The induction portion comprises a partition wall portion that is airtightly connected to the source portion and the film forming portion, respectively, and allows passage of the plasma therethrough, and a plurality of magnet portions that form a magnetic field for inducing the plasma into the partition wall portion. The plurality of magnet portions are connected so that their connection angles can be adjusted, and the partition wall portion has a tubular member bendable according to the connection angles of the plurality of magnet portions.SELECTED DRAWING: Figure 1 |
