| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope which allows for reduction in size and cost, by performing buffering and temperature control of a sample effectively.SOLUTION: An electron microscope 100 includes a carrier 110, a first drive unit 120, a flow buffer unit 130 and an electron source 140. A sample is placed on the carrier 110. The first drive unit 120 drives a first fluid to flow along a first flow path P1, which passes through the sample. The flow buffer unit 130 is arranged in the first flow path P1, and performs buffering of the first fluid, which flows through the flow buffer unit 130 and carrier 110, in order. The electron source 140 provides an electron beam E to the sample.SELECTED DRAWING: Figure 1 |
