ORGANIC GROUP 13 PRECURSOR AND METHOD FOR DEPOSITING THIN FILM USING SAME

摘要

An organic group 13 precursor according to one embodiment of the present invention is indicated as (R1R2N) M (L1L2), wherein M is selected from metals which belong to group 13 elements in the periodic chart, L1 and L2 are independently selected from an alkyl group having 1 to 6 carbon numbers or a cycloalkyl group having 3 to 6 carbon numbers, and R1 and R2 are independently selected from an alkyl group having 1 to 6 carbon numbers or a cycloalkyl group having 3 to 6 carbon numbers.