| 摘要 |
PURPOSE:To easily manage processes by easily observing a recognition mark from a surface by providing a transparent thin film on an opaque thin film area with recognition mark. CONSTITUTION:A recognition mark part 4 is formed in the display area of an element pattern part 3 and a blank part excepting for a terminal area. This recognition mark part 4 includes a lower layer metallic thin film 7 as the opaque thin film with recognition mark formed on a glass substrate 1, and the surface of this part 4 is covered with lower and upper layer insulated films 8 and 11 as transparent thin films. Thus, since the recognition mark has light transmissivity, the contrast is improved and the mark can be recognized not only visually but also by using a sensor equipment.
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