Cooled effusion cell for wideband infra=red heating of substance(s)

摘要

An effusion cell, especially for low temperature evaporation processes, has an infra-red (IR) transparent (preferably silicon) crucible (4) which allows direct heating of the contained substances by wideband IR radiation, and which is cooled by cooling elements (3, 9) such that its inner wall temperature is the same as, or preferably >= that of the substances in thermal equilibrium with the IR radiation. Also claimed is a method of heating substances in the effusion cell crucibles by direct energy supply to substances by IR radiation, while suppressing heat conduction between the crucible and the substances.