发明名称 Optical element, projection lens and associated projection exposure apparatus
摘要 An optical element (1) made of a material that is transparent to wavelengths in the UV region, which optical element (1) includes an oleophobic coating (6, 7) outside of its optically free diameter whose disperse component of the surface energy is preferably 25 mN/m or less, particularly preferably 20 mN/m or less, in particular 15 mN/m or less. In addition or as an alternative, the optical element (1) within its optically free diameter comprises an oleophilic coating (9b, 9c) that is transparent to wavelengths in the UV region, with the disperse component of the surface energy of this coating preferably being more than 25 mN/m, particularly preferably more than 30 mN/m, in particular more than 40 mN/m. The optical element may be provided in an arrangement in which it dips at least partially into an organic liquid.
申请公布号 US7738187(B2) 申请公布日期 2010.06.15
申请号 US20080134062 申请日期 2008.06.05
申请人 CARL ZEISS SMT AG 发明人 PAZIDIS ALEXANDRA;SIX STEPHAN;DUESING RUEDIGER;FEDOSENKO GENNADY
分类号 G02B13/14 主分类号 G02B13/14
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