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发明名称
POLISHING PAD AND METHOD FOR FORMING THE SAME
摘要
申请公布号
KR100590202(B1)
申请公布日期
2006.06.15
申请号
KR20030060261
申请日期
2003.08.29
申请人
发明人
分类号
H01L21/304;B24B37/04;B24D11/00;B24D13/14
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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