发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a means for reducing the warp of a semiconductor device which uses a lower substrate having a thermal expansion coefficient different from its lower seal resin layer. <P>SOLUTION: The semiconductor device 1 comprises a silicon substrate 2 having a wiring pattern formed by a plurality of wirings, a semiconductor chip 6 located above the silicon substrate 2 which is electrically connected to the wirings, a seal resin layer 9 substantially sealing the semiconductor chip 6 like a column, and a metal plate 10 substantially covering the entire upside of the seal resin layer 9. The metal plate 10 and the silicon substrate 2 have approximately the same thermal expansion coefficient. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006269861(A) 申请公布日期 2006.10.05
申请号 JP20050087644 申请日期 2005.03.25
申请人 OKI ELECTRIC IND CO LTD 发明人 SAEKI YOSHIHIRO
分类号 H01L23/29;H01L21/56;H01L23/31;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L23/29
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