| 摘要 |
A stocker system, and a driving method thereof are provided to prevent equipment interference and injuries of an operator by disposing a sensor at a stoker port to detect every region where an operation is performed, and controlling the stocker port in response to a signal detected by the sensor. A port frame(105) receives a cassette(103). A master arm(115) puts/takes the cassette into/out of the port frame. A motor(107) drives the rack master arm. A first detection sensor(108) is disposed above the motor and detects an operation space where the rack master arm operates. Area sensors(109a,109b) are disposed at both sides of the port frame, and detects an operation space where the rack master arm operates. A second detection sensor(111) detects whether the cassette is present in the port frame or not. |
