发明名称 DEVICES AND METHODS FOR PROCESSING AND HANDLING PROCESS GOODS
摘要 The invention relates to a device for processing a process product using a process medium, comprising a unit (12) for providing the process medium, and a transport unit. The transport unit has a transport element (24) that is configured in order to move the process product (10) along a process path between a receiving process of a receiving device and a handing over process of a handing over device, and in order to move from the receiving process to the handing over process of the process product (10). The process product enters the process medium (14) from the side, and is moved by the medium, or floats along on top of the process medium (14).
申请公布号 CA2731592(A1) 申请公布日期 2010.01.28
申请号 CA20092731592 申请日期 2009.07.21
申请人 SINGULUS STANGL SOLAR GMBH 发明人 STANGL, WOLFGANG;DOLCH, MICHAEL;MENSCHICK, MARTIN MAXIMILIAN
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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