Method for obtaining data of substrate processing apparatus and sensor substrate

摘要

According to an embodiment of the present invention, a data obtainment method for obtaining data on gas flow directions in a plurality of measurement regions in a surface of a substrate loaded onto a loading unit of a substrate processing apparatus is provided. The method includes loading a sensor substrate onto the loading unit in a first direction, and changing the first direction into a second direction. Further, it is obtained a vector data of a gas flow in a first straight direction and a vector data of a gas flow in a second straight direction from each first sensor of the sensor substrate loaded in the first and second directions. Also, the method includes calculating a gas flow direction at each starting point in the first and second measurement regions by combining the vector data.

主权项

1. A method for obtaining data on gas flow directions in a plurality of measurement regions in a surface of a substrate loaded onto a loading unit of a substrate processing apparatus, the method comprising:
loading a sensor substrate onto the loading unit in a first direction for obtaining data of gas flow directions in a first measurement region of a surface of the substrate, wherein the sensor substrate includes plural pairs of sensors provided at different distances from each other as viewed from a center of the surface, and wherein each pair of the sensors includes first and second sensors for obtaining vector data of a gas flow; changing the direction of the sensor substrate on the loading unit into a second direction to obtain data of gas flow directions in a second measurement region, wherein the second measurement region is separate from the first measurement region around the center of the substrate; obtaining vector data of a gas flow in a first straight direction from each first sensor of the sensor substrate loaded in the first and second directions, wherein the first straight direction is set along the surface of the sensor substrate for the first sensor; obtaining vector data of a gas flow in a second straight direction from each second sensor of the sensor substrate loaded in the first and second directions, wherein the second straight direction is set along the surface of the sensor substrate for the second sensor, and wherein the second straight direction makes an angle with the first straight direction set for the first sensor which makes a pair with the second sensor; and calculating a gas flow direction at each starting point in the first and second measurement regions by combining the vector data of the gas flow vector obtained from the first and second sensors which makes a pair with each other based on a predetermined starting point for the pair of the sensors.