PEELING DEVICE AND PEELING METHOD FOR LAMINATE, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a peeling device and peeling method for a laminate capable of preventing a crack due to movement in a direction parallel to an interface generated with the bending state of a substrate and a reinforcement plate, and a manufacturing method of an electronic device.SOLUTION: A peeling device 40 of a laminate comprises: a lower side peeling unit 42 which supports a laminate 6 including a substrate 2A; an upper side peeling unit 42 which adsorbs a reinforcement plate 3A of the laminate 6; a drive unit 48 which deforms the reinforcement plate 3A in a flexural manner by being moved independently with respect to the lower side peeling unit 42 and sequentially peels interfaces; and a connection mechanism 80 which makes the substrate 2A and the reinforcement plate 3A relatively slide in the direction parallel to the interface.SELECTED DRAWING: Figure 6