Angular velocity sensor

摘要

An angular velocity sensor including a vibration body having a sensor electrode, a driving electrode, and a monitor electrode. The monitor electrode generates a signal according to vibration of the vibration body. The sensor circuit outputs a signal representing an angular velocity applied to the vibration body. The amplitude determination circuit measures amplitude of vibration of the vibration body. A PLL circuit includes a constant voltage source for generating a constant voltage, a timing switching unit for outputting a voltage by switching selectively between the constant voltage and a voltage corresponding to the monitor signal, and a voltage-controlled oscillator for outputting an oscillation signal having a frequency corresponding to the voltage output from the timing switching unit. When the amplitude measured is smaller than a predetermined value, the timing switching unit outputs the constant voltage output from the constant voltage source and outputs a start-up mode signal.

主权项

1. An angular velocity sensor comprising:
a vibration body; a sensor electrode provided on the vibration body for generating a signal corresponding to an angular velocity applied to the vibration body; a driving electrode provided on the vibration body, the driving electrode having a driving signal for vibrating the vibration body input thereto; a monitor electrode provided on the vibration body for generating a signal according to vibration of the vibration body; a PLL circuit including
a constant voltage source for generating a constant voltage,a timing switching unit for outputting a voltage by switching selectively between the constant voltage and a voltage corresponding to the monitor signal, anda voltage-controlled oscillator for outputting an oscillation signal having a frequency corresponding to the voltage output from the timing switching unit; a drive circuit for supplying the driving signal to the driving electrode based on the oscillation signal output from the voltage-controlled oscillator as to vibrate the vibration body at a predetermined amplitude; a sensor circuit for outputting a signal representing the angular velocity based on the signal output from the sensor electrode; and an amplitude determination circuit for measuring amplitude of vibration of the vibration body based on a signal output from the drive circuit, wherein: a) when the amplitude measured by the amplitude determination circuit is smaller than a predetermined value, the timing switching unit outputs the constant voltage output from the constant voltage source to the voltage-controlled oscillator, and outputs a start-up mode signal to a device outside of the angular velocity sensor, the start-up mode signal indicating to the device that the angular velocity sensor is unable to detect the angular velocity normally under a state of start-up, and b) when the amplitude measured by the amplitude determination circuit is greater than the predetermined value, the timing switching unit outputs a phase adjustment mode signal to the device outside of the angular velocity sensor, the phase adjustment mode signal indicating to the device that the angular velocity sensor is unable to detect the angular velocity normally under a state of phase adjustment.