Arrangement for mounting an optical element

摘要

The invention relates to an arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus, comprising a weight force compensation device for exerting a compensation force on the optical element, wherein the compensation force at least partly compensates for the weight force acting on the optical element, wherein the weight force compensation device has a passive magnetic circuit for generating a force component of the compensation force acting on the optical element, and wherein at least one adjustment element is provided via which the force component generated by the passive magnetic circuit is continuously adjustable.

主权项

1. An arrangement, comprising:
a weight force compensation device configured to exert a compensation force on an optical element to at least partly compensate a weight force acting on the optical element; and an adjustment element completely surrounding the weight force compensation device, wherein:
the weight force compensation device comprises a passive magnetic circuit configured to generate a force component of the compensation force; andthe adjustment element is configured so that the force component of the compensation force is continuously adjustable.