PELLICLE AGING ESTIMATION AND PARTICLE REMOVAL FROM PELLICLE VIA ACOUSTIC WAVES

摘要

A pellicle is disposed over a lithography mask. An acoustic wave generator is placed over the pellicle. The acoustic wave generator is configured to generate acoustic waves to cause the pellicle to vibrate at a target resonance frequency. A resonance detection tool is configured to detect an actual resonance frequency of the pellicle in response to the acoustic waves. One or more electronic processors are configured to estimate an age condition of the pellicle as a function of a shift of the actual resonance frequency from the target resonance frequency.

主权项

1. A system, comprising:
a pellicle disposed over a lithography mask; an acoustic wave generator placed over the pellicle, wherein the acoustic wave generator is configured to generate acoustic waves to cause the pellicle to vibrate at a target resonance frequency; a resonance detection tool configured to detect an actual resonance frequency of the pellicle in response to the acoustic waves; and one or more electronic processors configured to estimate an age condition of the pellicle as a function of a shift of the actual resonance frequency from the target resonance frequency.