Purge apparatus and load port

摘要

A purge apparatus for replacing a gas atmosphere in a purge object vessel by a purge gas through a port provided on a bottom face of the purge object vessel is disclosed. The purge apparatus includes a purge unit attached to a table that receives the purge object vessel, and a purge nozzle body including a port contacting portion provided on an upper side of the purge nozzle body and an attachment object portion provided on a lower side of the purge nozzle body. The purge unit has an attachment portion and the port contacting portion of the purge nozzle body is configured to contact the port of the purge object vessel. The attachment object portion of the purge nozzle body removably engages with the attachment portion of the purge unit so that the purge nozzle body is removably attached to the purge unit.

主权项

1. A purge apparatus for replacing a gas atmosphere in a purge object vessel by a purge gas through a port provided on a bottom face of the purge object vessel, the purge apparatus comprising:
a purge unit attached to a table that receives the purge object vessel, the purge unit including an attachment portion; and a purge nozzle body including a port contacting portion provided on an upper side of the purge nozzle body, and an attachment object portion provided on a lower side of the purge nozzle body, wherein the port contacting portion of the purge nozzle body is configured to contact the port of the purge object vessel, the attachment object portion of the purge nozzle body is configured to removably engage with the attachment portion of the purge unit, and the purge nozzle body is configured to be removably attached to the purge unit by removably engaging the attachment object portion with the attachment portion, the attachment object portion being one of a male threaded portion and a female threaded portion, the attachment portion being one of the female threaded portion and the male threaded portion corresponding to the attachment object portion, and the attachment object portion being removably engaged with the attachment portion by screwing the male threaded portion with the female threaded portion.