| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute amount moisture generation device having a wide moisture concentration adjustable range, easily changing moisture concentration in a short time, and easily performing continuous humidification for a long period of time, and a minute amount moisture generation method.SOLUTION: A humidifying target gas is made to flow in from an inflow pipe 21 and the humidifying target gas is made to flow out from an outflow pipe 22. Then, when the humidifying target gas circulates on an inner peripheral surface 32 of a humidifying target gas circulation pipe 3, water molecules are transmitted and penetrate from an outer peripheral surface 31 to the inner peripheral surface 32 of the humidifying target gas circulation pipe 3. As a result, the water molecules are supplied to the humidifying target gas, and thus the humidifying target gas is humidified. The moisture concentration of the humidifying target gas which flows out can be controlled by the magnitude of an area where the humidifying target gas is brought into contact with the inner peripheral surface 32 of the humidifying target gas circulation pipe 3. |
