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发明名称
APPARATUS AND METHOD FOR ENHANCED CRITICAL DIMENSION SCATTEROMETRY
摘要
申请公布号
EP1864080(A1)
申请公布日期
2007.12.12
申请号
EP20060735920
申请日期
2006.02.24
申请人
NANOMETRICS INCORPORATED
发明人
RAYMOND, CHRIS;HUMMEL, STEVE
分类号
G01B11/06;G01N21/47
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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