| 摘要 |
PROBLEM TO BE SOLVED: To provide a roll cleaning member including nodules formed on the surface thereof, in which each nodule is improved in detergency.SOLUTION: A roll cleaning member 50 for scrub-cleaning a surface to be cleaned of a substrate S includes a plurality of nodules 54 on the surface thereof. Each nodule 54 has a slit 542 extending to be nonparallel to a rotation direction c of the roll cleaning member 50, and the roll cleaning member has a plurality of upstream edges 541e1, 541e2 in a circumferential direction c of the roll cleaning member 50, the upstream edges being formed by the slit 542 and contacting the surface to be cleaned at first when a cleaning surface 541 of each nodule 54 comes into contact with the surface to be cleaned of the substrate S by the rotation of the roll cleaning member 50.SELECTED DRAWING: Figure 5 |
