Vibration tolerant acceleration sensor structure

摘要

A MEMS structure comprises an anchor, a spring, and a seismic mass that is suspended to the anchor via the spring to pivot around an axis of rotation. Errors from unwanted vibration modes are reduced by including in the MEMS structure a spring structure that extends from the seismic mass to the anchor. Said spring structure comprises a side arm that is connected to the seismic mass or the anchor. At least part of the spring structure is formed by a side arm that extends in the spring structure in a direction parallel to the axis of rotation of the seismic mass; and is attached to one end of the spring.

主权项

1. A MEMS structure, comprising an anchor, a spring, and a seismic mass that is suspended to the anchor via the spring to pivot around an axis of rotation, wherein
the spring is included in a spring structure that extends from the seismic mass to the anchor; the spring structure includes also a side arm and a shoulder means; the side arm is connected to the seismic mass and extends from the seismic mass in a direction parallel to the axis of rotation of the seismic mass; the shoulder means is connected to one end of the side arm and to one end of the spring for attaching the side arm to the one end of the spring.