Optical detection for bio-entities

摘要

An integrated semiconductor device for manipulating and processing bio-entity samples and methods are described. The device includes a lower substrate, at least one optical signal conduit disposed on the lower substrate, at least one cap bonding pad disposed on the lower substrate, a cap configured to form a capped area, and disposed on the at least one cap bonding pad, a microfluidic channel, wherein a first side of the microfluidic channel is formed on the lower substrate and a second side of the microfluidic channel is formed on the cap, a photosensor array coupled to sensor control circuitry, and logic circuitry coupled to the fluidic control circuitry, and the sensor control circuitry.

主权项

1. An integrated semiconductor device for manipulating and processing bio-entity samples, the device comprising:
a lower substrate; at least one optical signal conduit disposed on the lower substrate; at least one cap bonding pad disposed on the lower substrate and over a portion of the optical signal conduit; a cap comprising an upper substrate and configured to form a capped area, and disposed on the at least one cap bonding pad, wherein the at least one optical signal conduit extends from outside the capped area to inside the capped area; a microfluidic channel, wherein a first side of the microfluidic channel is formed on the lower substrate and a second side of the microfluidic channel is formed on the cap, the cap being coupled to the substrate so as to provide the microfluidic channel for a droplet containing a bio-entity sample and the microfluidic channel being coupled to fluidic control circuitry; a photosensor array coupled to sensor control circuitry; and logic circuitry coupled to the fluidic control circuitry and the sensor control circuitry, wherein the fluidic control circuitry, the sensor control circuitry, and the logic circuitry are formed on the lower substrate.