FORMATION METHOD

摘要

The present invention provides a formation method of forming, on a substrate, a fin pattern in which a plurality of linear fins are arrayed, the method comprising forming a resist pattern having a line-and-space shape on the substrate, wherein the substrate includes a first active region and a second active region adjacent to each other, and in the forming the resist pattern, the resist pattern is formed on the substrate such that an interval between a first fin and a second fin becomes wider than a pitch of the fins, the first fin being closest to a boundary of the first active region and the second active region out of the fins formed in the first active region, and the second fin being closest to the boundary out of the fins formed in the second active region.

主权项

1. A formation method of forming, on a substrate, a fin pattern in which a plurality of linear fins extending in a first direction are arrayed in a second direction different from the first direction, the method comprising:
forming a resist pattern having a line-and-space shape on the substrate; forming a side wall in each of a plurality of line elements in the resist pattern; removing the resist pattern; and forming the fin pattern on the substrate by etching the substrate by using the side walls as etching masks, wherein the substrate includes a first active region and a second active region adjacent to each other in the second direction and different in a conductivity type, and in the forming the resist pattern, the resist pattern is formed on the substrate such that an interval between a first fin and a second fin becomes wider than a pitch of the fins formed in the first active region and a pitch of the fins formed in the second active region, the first fin being closest to a boundary of the first active region and the second active region out of the fins formed in the first active region, and the second fin being closest to the boundary out of the fins formed in the second active region.