发明名称 HOLDING AND ROTATING APPARATUS FOR FLAT OBJECTS
摘要 The invention relates to a holding and rotating apparatus for flat objects which define an object plane, having a gripper device that is rotatable about a rotation axis, said gripper device having a plurality of edge grippers and being designed to fix the object in a defined position in all spatial directions, the object plane being oriented perpendicularly to the rotation axis in said position, and having a rotary drive coupled to the gripper device, said rotary drive being designed to set the gripper device with the object in rotation about the rotation axis. The invention is characterized by a device for distance positioning, said device being designed to apply a supporting force, directed perpendicularly to the object plane, to the object in a contactless manner.
申请公布号 US2016260631(A1) 申请公布日期 2016.09.08
申请号 US201415028175 申请日期 2014.10.06
申请人 RUDOLPH TECHNOLOGIES GERMANY GMBH 发明人 Möllmann Felix;Drews Dietrich;Wenz Holger
分类号 H01L21/687;G01N21/01;G01N21/95;H01L21/68 主分类号 H01L21/687
代理机构 代理人
主权项
地址 Mainz DE