FORCE SENSOR AND MULTYAXIAL FORCE/TORQUE SENSOR USING THE SAME

摘要

Disclosed are a force sensor and a multi-axial force/torque measuring device using the same which precisely measures an external force applied in a horizontal and a vertical direction. According to the present invention, the force sensor comprises: a ground unit which is a grounded conductor whose position is changed in accordance with an external force, and includes a flat module which is a flat conductor and a protruding module which is a conductor protruding from a lower surface of the flat module; a substrate unit which is a flat substrate, separated from the lower surface of the flat module by a predetermined distance or longer, and has a hole into which the protruding module is able to be inserted; a first electrode unit which is an electrode formed on an upper surface of the substrate unit, forming a capacitance with the flat module when power is applied; and a second electrode unit which is an electrode formed adjacent to the hole of the substrate unit, forming capacitance with the protruding module when power is applied. A change in capacitance is used to precisely measure an external force applied in a horizontal and a vertical direction.