Method and apparatus for measuring the shape of a wave-front of an optical radiation field

摘要

Method for measuring shape of wavefront of optical radiation field generated by radiation source, includes: (a) setting diaphragm positions in pinhole diaphragm having diaphragm opening movable transversely to radiation source's optical axis, wherein a partial beam from radiation field passes through diaphragm opening at each diaphragm position and is imaged on optical sensor by imaging optics device; (b) recording lateral positions of partial beam relative to optical axis of imaging optics device, wherein lateral positions each with one of the diaphragm positions of pinhole diaphragm are recorded by optical sensor, and determining the shape of wavefront from recorded lateral positions of partial beam, wherein beam incidence range of the partial beam which is invariable for all diaphragm positions is set on imaging optics device with a pentaprism arrangement including at least first pentaprism and positioned between pinhole diaphragm and imaging optics device. A wavefront shape measuring device is also described.

主权项

1. A method for measuring the shape of a wavefront of an optical radiation field which is generated by a radiation source, comprising the steps:
setting various diaphragm positions of a pinhole diaphragm, which has a diaphragm opening movable transversely to an optical axis of the radiation source, wherein a partial beam from a radiation field is passed through the diaphragm opening at each diaphragm position and is imaged on a spatially-resolving optical sensor by an imaging optics device, recording lateral positions of the partial beam relative to an optical axis of the imaging optics device, wherein the lateral positions each with one of the diaphragm positions of the pinhole diaphragm are recorded by the optical sensor, and determining the shape of the wavefront from the recorded lateral positions of the partial beam, wherein a beam incident range of the partial beam which is invariable for all diaphragm positions is set on the imaging optics device with a pentaprism arrangement, which comprises at least a first pentaprism and is positioned between the pinhole diaphragm and the imaging optics device.