| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder capable of improving the maintainability such as exchange of a seal member.SOLUTION: Provided is a substrate holder including: an insider seal member 66 for sealing a movable holding member 58 and the outer circumferential part of a substrate W; an outside seal member 68 for sealing a space between a fixing-retaining member 54 and a movable holding part 58; a seal holder 62 for fitting the inside seal member 66 and the outside seal member 68; a single fixing ring 70 contacted to the inside seal member 66 and the outside seal member 68 and pressing both the inside seal member 66 and the outside seal member 68 against the seal holder 62; and a fastener 69 for fitting the fixing ring 70 to the shied holder 62. |
