| 摘要 |
The invention relates to a pressure sensor including: a sensitive element including a mounting substrate, said mounting substrate including a top surface and a bottom surface, the sensitive element also including a deformable diaphragm that is connected to the top surface of the mounting substrate; a housing, in which the sensitive element is placed, said housing including a base; an intermediate structure placed between the base of the housing and the mounting substrate, said intermediate structure including a base, the base including a top surface and a bottom surface that is connected to the base of the housing, said intermediate structure being configured such as to keep the mounting substrate at a predetermined distance from the top surface of the intermediate structure; and an adhesive layer extending onto the top surface of the intermediate structure. Said adhesive layer has a thickness controlled by the predetermined distance at which the mounting substrate is kept from the top surface of the intermediate structure. The invention also relates to a method for making such a pressure sensor. |
| 主权项 |
1. Pressure sensor comprising:
a sensitive element (1) comprising a mounting substrate (11) said mounting substrate (11) comprising a top surface (11a) and a bottom surface (11b), the sensitive element (1) further comprising a deformable diaphragm (10) connected to the top surface (11a) of the mounting substrate (11); a housing (2) in which the sensitive element is placed, with the housing comprising a base (21); an intermediate structure (4) placed between the base (21) of the housing (2) and the mounting substrate (11), said intermediate structure (4) comprising a base (41, 41d), with the base (41, 41d) comprising a top surface (41a) and a bottom surface (41b) connected to the base (21) of the housing, said intermediate structure (4) further comprising a plurality of wedges (42, 43, 44, 45) arranged to keep the mounting substrate (11) at a predetermined distance (d) from the top surface (41a) of the base (41, 41d); an adhesive layer (3) extending over the top surface of the base (41, 41d) and between the wedges, said adhesive layer (3) being of a thickness (e) controlled by the predetermined distance (d) at which the mounting substrate (11) is kept from the top surface of the base (41, 41d). |
