| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor device that reduces the risk of occurrence of an undesirable offset signal with its measurement accuracy improved easily and at low cost. <P>SOLUTION: This problem is solved by configuring the sensor device such that the surface of a vibratory mass that is closer to a substrate is symmetric with respect to the torsion axis. Further, this problem is solved by disposing a bonding region in a hanging region as seen in a direction perpendicular to the torsion axis and parallel to the principal plane and/or disposing the bonding region in direct contact with the hanging region. <P>COPYRIGHT: (C)2010,JPO&INPIT |
