| 摘要 |
Vibration arms are prevented from contacting a top or bottom substrate even in a resonance device that has been reduced in size. The invention is provided with a resonator and a top lid and a bottom lid that face each other across the resonator. The resonator has: a base part; a plurality of vibration arms having a piezoelectric body and a pair of electrode layers that face each other with the piezoelectric body interposed therebetween, one end of each vibration arm being connected to the front end of the base, and the vibration arms extending in a direction away from the base; a holding part provided in at least one part of the area around the base and the vibration arms; and holding arms, one end of which being connected to the base, and the other end of which being connected to the holding part on the other-end side of the plurality of vibration arms, rather than on the one end of the plurality of vibration arms. The base, the plurality of vibration arms, and the holding arms have a substrate and a temperature characteristic correction layer laminated on the substrate, and are integrally formed by the substrate and the temperature characteristic correction layer. The temperature characteristic correction layer comprises a material having a different thermal expansion rate from that of the substrate. |
