发明名称 Method for removing non-bonding compound from polycrystalline materials on solar panel
摘要 A method for removing non-bonding compounds from absorber layers of a plurality of absorber substrates during a cleaning process comprises setting one or more conditions of a solution in a solvent tank used to clean the non-bonding compounds from the absorber layers of the absorber substrates. The method further comprises calculating thickness of boundary layers formed on the absorber layers based on hydrodynamics of the solution in the solvent tank during the cleaning process, and setting one or more of spacing between the absorber substrates and circulation speed of the solution in the solvent tank during the cleaning process. The method further comprises immersing and cleaning the absorber substrates in the solvent tank under one or more of the set conditions, spacing and circulation speed of the solution.
申请公布号 US9498799(B2) 申请公布日期 2016.11.22
申请号 US201414203592 申请日期 2014.03.11
申请人 Taiwan Semiconductor Manufacturing Co., Ltd. 发明人 Chen Shih-Wei
分类号 B08B3/04;B08B3/10;H01L31/18 主分类号 B08B3/04
代理机构 Duane Morris LLP 代理人 Duane Morris LLP
主权项 1. A method for removing a non-bonding compound from an absorber layer of an absorber substrate during a cleaning process, comprising: setting one or more conditions of a solution in a solvent tank used to clean the non-bonding compounds from the absorber layer of the absorber substrate; calculating thickness of a boundary layer formed on the absorber layer in the solvent tank during the cleaning process; setting circulation speed of the solution in the solvent tank during the cleaning process; and immersing and cleaning the absorber substrate in the solvent tank under the set conditions and circulation speed of the solution.
地址 Hsin-Chu TW