| 摘要 |
PROBLEM TO BE SOLVED: To prevent a detection electrode from being damaged when polarized by setting a polarization terminal electrode which is formed at a part connected to an upper electrode and overlaps with an upper part of a hollow diaphragm- supporting part and butting a polarization electrode jig against the polarization terminal electrode, thereby polarizing the electrode. SOLUTION: Detection electrodes B1-B4 are formed over both a diaphragm part and a diaphragm-supporting part. Polarization terminal electrodes B1-1 to B1-3, B2-1 to B2-3, B3-1 to B3-3, B4-1 to B4-3 are formed on an upper face of the diaphragm-supporting part at the detection electrodes respectively. A detection electrode B5 is formed at a central part of a diaphragm, having polarization terminal electrodes B5-1 to B5-4 formed on the upper face of the diaphragm-supporting part. The detection electrode B5 is connected with the polarization terminal electrodes B5-1 to B5-4 by a lead electrode. A polarization terminal jig is provided with an escape part to receive the upper face of the diaphragmsupporting part and not to come in touch with the diaphragm part. The diaphragm part is accordingly polarized in a state without a mechanical stress. |
