METHOD FOR PRODUCING MASTER DISK FOR PRODUCING FORMED SUBSTRATE WITH GROOVE, METHOD FOR PRODUCING STAMPER FOR PRODUCING FORMED SUBSTRATE WITH GROOVE, METHOD FOR PRODUCING FORMED SUBSTRATE WITH GROOVE, FORMED SUBSTRATE WITH GROOVE, STORAGE MEDIUM, STORAGE, AND COMPUTER

摘要

A substrate 3 on which a photoresist 2 is coated is exposed to an exposure light along a line through a lens 1. Then, the exposure position is moved from the initial position O1 to the position O2 apart from a distance corresponding to a summation of a groove width Gw and a land width Lw. The exposure is carried out along a line parallel to the initial exposure line, and with repeating this, exposed areas 2e having a width Lw and a separation Gw are formed on the resist 2. Then, the resist is developed, the exposed areas 2e are removed, resin or the like is pressed on it, and a replica is formed. From the replica, a stamper is, then, manufactured by using an electroforming method. Finally, a grooved molding substrate is manufactured from glass or resin by using the stamper. Although the land width Lw is defined by the effective spot diameter DIAMETER of the optical system, the groove width Gw can be less than this value. <IMAGE>