| 摘要 |
<p>PURPOSE: A device and a method for manufacturing a solar cell are provided to increase a deposition speed by forming a layer on a substrate with the gas sprayed from a nozzle on an electrode with a supersonic speed. CONSTITUTION: A device for manufacturing a solar cell includes a first electrode(110), a second electrode(120), a chamber(130), and a nozzle(121). The first electrode is connected to a high frequency power source. The second electrode is connected to a ground. The chamber is between the first electrode and the second electrode and contains the plasma. A nozzle is formed on one of the first electrode and the second electrode and the layer is formed on a substrate(140) with the gas which is sprayed with a supersonic speed.</p> |
