发明名称 |
FILM FORMING DEVICE |
摘要 |
A film forming device, characterized by comprising a treatment container specifying a chamber, a loading table installed in the chamber and allowing a treated substrate to be loaded thereon, a shower head installed opposite to the loading table and having a large number of gas discharge holes, a gas feeding mechanism for feeding treatment gas into the chamber through the shower head, and a shower head temperature control means for controlling the temperature of the shower head.
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申请公布号 |
WO02063065(A1) |
申请公布日期 |
2002.08.15 |
申请号 |
WO2002JP01110 |
申请日期 |
2002.02.08 |
申请人 |
TOKYO ELECTRON LIMITED;KASAI, SHIGERU;KAKEGAWA, TAKASHI |
发明人 |
KASAI, SHIGERU;KAKEGAWA, TAKASHI |
分类号 |
C23C16/44;C23C16/455;H01J37/32;H01L21/285;(IPC1-7):C23C16/455 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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