Mehrkanaliges Ausrichtsystem unter Verwendung eines Interferenzgitters,申请号DE20006030374T-传众专利搜索

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发明名称	Mehrkanaliges Ausrichtsystem unter Verwendung eines Interferenzgitters
摘要
申请公布号	DE60030374(T2)	申请公布日期	2006.12.21
申请号	DE20006030374T	申请日期	2000.07.21
申请人	ASML HOLDING, N.V.	发明人	STANTON, STUART T.
分类号	G01B11/00;G03F9/00;H01L21/027	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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