| 摘要 |
An electrostatic absorption electrode and a processing apparatus are provided to obtain high heat delivery efficiency by implementing a heat delivery medium liquid path between absorption electrodes. An electrostatic absorption electrode(5) includes plural base members(30,31), which are detached from each other, and mount planes(5a,5b) for mounting an objective member(G). A heat delivery medium liquid path(9c) for providing heat delivery medium toward a rear surface of the objective member is formed between at least two the base members in the electrode to reach up to the mount planes. The heat delivery medium liquid path is formed with an angle, 45‹Œ15‹, with respect to a vertical direction.
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