发明名称 PRECISION STRIP HEATING ELEMENT
摘要 PURPOSE: A strip heating element is provided to uniformly discharge heat from all surfaces without an additional electric energy for heating the substrate by providing a separation distance between a heating element and an adiabatic substrate through mounting members. CONSTITUTION: The path of a successive strip(12) detours from a first end(16) to a second end and includes a plurality of repetitive cycles(20). The repetitive cycle comprises a plurality of first straight segments(22), a plurality of second straight segments(24), and a plurality of curved segments(26).
申请公布号 KR20100090220(A) 申请公布日期 2010.08.13
申请号 KR20100010921 申请日期 2010.02.05
申请人 MRL INDUSTRIES, INC. 发明人 PECK KEVIN B.
分类号 H01L21/02;H01L21/22 主分类号 H01L21/02
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