发明名称 TFT SHEET AND METHOD FOR MANUFACTURING SAME
摘要 <p>Disclosed is a manufacturing method to effectively form elements with accuracy including a gate electrode, a gate insulating layer, a semiconductor layer, source electrode and a drain electrode used for a thin-film transistor (TFT) sheet on a resin film. The manufacturing method of the TFT sheet, wherein two or more element-forming processes are conducted while rotating a rotating support after a substrate is fixed on the rotating support has been introduced in order to manufacture the TFT sheet in which a plurality of thin-film transistors having a source electrode and a drain electrode connected with a gate electrode, a gate insulating layer and a semiconductor layer on a substrate are connected through a gate busline and a source busline.</p>
申请公布号 EP1732115(A4) 申请公布日期 2009.03.04
申请号 EP20050720930 申请日期 2005.03.16
申请人 KONICA MINOLTA HOLDINGS, INC. 发明人 HIRAI, K.
分类号 H01L21/336;H01L21/00;H01L21/77;H01L21/84;H01L27/28;H01L29/786;H01L51/10;H01L51/30 主分类号 H01L21/336
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