<p>An apparatus for supporting a reticle is provided to facilitate the reticle support by using a reticle support member made of an elastomer material. A reticle supporting member(20) is inserted into a chuck body(10) and is received in an upper surface of the chuck body. A holding member(30) is arranged in the upper surface of the reticle support member and is coupled to the chuck body to prevent the reticle supported by the reticle support member from being separated and fix the reticle support member in the chuck body. The reticle support member is made of the elastomer material to prevent the movement of the reticle. The chuck body is composed of a square frame. An insertion groove into which the reticle support member is inserted is formed in each edge of the chuck body.</p>
