MANUFACTURING METHOD OF VIBRATION ELEMENT, VIBRATION ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS AND MOBILE BODY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method capable of improving yield and productivity of a vibration element and reducing a manufacturing cost.SOLUTION: A manufacturing method of a gyro element as a vibration element is related to processing a quartz substrate to form a recess in an outer shape of a gyro element having a vibration arm, and in the vibration arm. The manufacturing method includes: a mask formation process S1, S2, S3, S4 of forming a metal mask on a quartz substrate; an outer shape formation process S5 of forming the outer shape of the gyro element by dry etching from one side of the quartz substrate; and a recess formation process S10 of forming a recess by wet etching.SELECTED DRAWING: Figure 2