| 发明名称 | Heat transfer sheet adhering apparatus and method | ||
| 摘要 | A heat transfer sheet adhering apparatus, for adhering a heat transfer sheet to a ring-shaped member adapted to be used in a substrate processing apparatus, includes a heat transfer sheet mounting part configured to mount the heat transfer sheet thereon; a ring-shaped member supporting part configured to support the ring-shaped member; and a vertically movable pressing part configured to press the ring-shaped member supported by the ring-shaped member supporting part against the heat transfer sheet mounted on the heat transfer sheet mounting part. The pressing part is configured to press the ring-shaped member gradually from an inner peripheral side to an outer peripheral side of the ring-shaped member or from the outer peripheral side to the inner peripheral side of the ring-shaped member. | ||
| 申请公布号 | US9427913(B2) | 申请公布日期 | 2016.08.30 |
| 申请号 | US201313937254 | 申请日期 | 2013.07.09 |
| 申请人 | TOKYO ELECTRON LIMITED | 发明人 | Kitabata Toshinori;Matsumoto Kazuya |
| 分类号 | B32B37/00;B29C65/00;H01L21/67;B29C65/78 | 主分类号 | B32B37/00 |
| 代理机构 | Rothwell, Figg, Ernst & Manbeck, P.C. | 代理人 | Rothwell, Figg, Ernst & Manbeck, P.C. |
| 主权项 | 1. A heat transfer sheet adhering apparatus for adhering a heat transfer sheet to a ring-shaped member adapted to be used in a substrate processing apparatus, the heat transfer sheet adhering apparatus comprising: a heat transfer sheet mounting part configured to mount the heat transfer sheet thereon; a ring-shaped member supporting part configured to support the ring-shaped member; and a vertically movable pressing part configured to press the ring-shaped member supported by the ring-shaped member supporting part against the heat transfer sheet mounted on the heat transfer sheet mounting part; wherein the pressing part is configured to press the ring-shaped member gradually from an inner peripheral side to an outer peripheral side of the ring-shaped member or from the outer peripheral side to the inner peripheral side of the ring-shaped member. | ||
| 地址 | Tokyo JP | ||