发明名称 BONDING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To reduce damage given to a semiconductor device when bonding. <P>SOLUTION: When spherical FAB13 is formed in a tail of a copper wire 11, load is applied to FAB13 before FAB13 is bonded to an aluminum pad 16, and a depression surface 13a depressed to the aluminum pad 16 is deformed into a planar shape. When FAB13 is depressed to the aluminum pad 16, load and supersonic vibration are applied to FAB13, and FAB13 is fixed to the aluminum pad 16. The copper wire 11 fixed to the aluminum pad 16 is formed into a loop, and the copper wire 11 is fixed to a lead 18. The depression surface 13a of FAB13 is deformed into the planar shape and it is bonded to the aluminum pad 16. Thus, load given to the aluminum pad 16 and the semiconductor device 15 can be reduced. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010182863(A) 申请公布日期 2010.08.19
申请号 JP20090024798 申请日期 2009.02.05
申请人 SHINKAWA LTD 发明人 BORINO MASAYUKI;FUJITA KAZUO
分类号 H01L21/60 主分类号 H01L21/60
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