发明名称 Concentration measurement apparatus calibration method
摘要 A concentration measurement device is calibrated for a target element by performing a concentration measurement on a reference standard sample which includes a number of atoms of a radioactive marker element in known ratio to a number of atoms of the target element. Both the ratio of atoms of the target element to those of the radioactive marker element and a count of decay products of the radioactive marker element are analytically quantified. Because the count of decay products is correlated with the number of atoms of the radioactive marker element, the ratio and the count of decay products are used to accurately calculate the otherwise unknown number of impurity atoms and to calibrate a concentration measurement signal from the concentration measurement device.
申请公布号 US5866899(A) 申请公布日期 1999.02.02
申请号 US19960712716 申请日期 1996.09.12
申请人 ADVANCED MICRO DEVICES, INC. 发明人 HOSSAIN, TIM Z.
分类号 G01N23/22;G01N23/225;H01J49/40;(IPC1-7):G01N23/00 主分类号 G01N23/22
代理机构 代理人
主权项
地址