发明名称 |
Improvements in crystal substrate processing |
摘要 |
<p>This disclosure relates to the fabrication of components on a single crystal substrate. A method is disclosed of overcoming the problems encountered in defining etched features on a silicon substrate. In particular, there is disclosed a method of producing a multichip module comprising a silicon substrate having surface features for the placement of components. An organic dielectric is applied to the substrate prior to the use of an etchant whereby interconnects can be defined. <IMAGE></p> |
申请公布号 |
EP0732739(B1) |
申请公布日期 |
2002.01.02 |
申请号 |
EP19960301377 |
申请日期 |
1996.02.29 |
申请人 |
NORTEL NETWORKS LIMITED |
发明人 |
AYLIFFE, PETER JOHN;HARRISON, PAUL MARK;GEEAR, MARTINE CHRISTOPHER;PARKER, JAMES WILSON;PEALL, ROBERT GEORGE;HARCOURT, ROGER WILLIAM |
分类号 |
C30B33/08;G02B6/36;G02B6/43;H01L21/306;H01L21/98;H01L23/13;H01L23/14;(IPC1-7):H01L23/14;H01L21/48 |
主分类号 |
C30B33/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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