发明名称 TAPE SUPPLYING METHOD AND APPARATUS THEREOF AND METHOD AND APPARATUS FOR ADHERING TAPE TO SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a tape adhering method introducing a method to supply a tape to a substrate for supplying the tape while keeping constant tension without providing a load heavier than that required for the tape at the time of supplying the tape to be pressed to the substrate. SOLUTION: In the tape supplying method for supplying the tape to be adhered to a substrate, the tape 6 wound to a supply reel 41 which is rotated by a motor 42 is supplied through a tension roller 43 provided on an tension arm 45 which is changed in the angle in accordance with a force to be applied, and the tape 6 is supplied, while keeping tension to a constant value by measuring the angle of the tension arm 45 by an encoder 46, and then adjusting an output of the motor 42 of the supply reel 41 to maintain the angle of the tension arm 45 to the predetermined angle on the basis of the result of measurement. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005236049(A) 申请公布日期 2005.09.02
申请号 JP20040043536 申请日期 2004.02.19
申请人 TAKATORI CORP 发明人 IWAOKI TETSUJI;KATAE MASAMUNE;UEJIMA YOSHIHIKO
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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