| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive optical element position inspecting apparatus with high position detection accuracy. SOLUTION: The position inspecting apparatus 20 emits light by supplying power to a light emitting optical element 21 by a power feeding means 23, and photographs an image of the light emitting element 21 in a light emitting condition by an imaging means 22. An image processing means 24 incorporated in the apparatus 20 sets a two-dimensional coordinate system constituted with a predetermined position on the image of the element 21 as the origin, and extracts the position selected on the image of the element 21, for example a coordinate on the two-dimensional coordinate system at the light emitting position. Further, a control unit 25 serving as a computing means incorporated in the apparatus 20 calculates the inclination of the light emission axis with respect to a two-dimensional coordinate axis based on the coordinate of the light emitting position extracted by the image processing means 24. COPYRIGHT: (C)2005,JPO&NCIPI
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