| 摘要 |
PROBLEM TO BE SOLVED: To provide a tackiness and thickness measuring instrument which eliminates the point at issue of a conventional portable tackiness measuring instrument and a conventional fixed type tackiness measuring instrument, facilitated in measuring work and capable of performing the accurate measurement of tackiness in a short time, and a measuring method using it. SOLUTION: In the tackiness and thickness measuring instrument equipped with an XY axial direction drive means 7 capable of moving the contact terminal 22 brought into contact with the measuring target 4 placed on a substrate 5 to the arbitrary position of the plane parallel to the surface of the measuring target 4 and a measuring means for measuring the pressing force and tensile force acting on the contact terminal 22 by the measuring target 4 by moving the contact terminal 22 in a vertical direction, the XY axial direction drive means 7 is equipped with a non-contact type thickness measuring instrument 24 for irradiating the surface of the measuring target 4 at the contact place with the contact terminal 22 to measure the thickness of the measuring target 4. COPYRIGHT: (C)2007,JPO&INPIT
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