| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor capable of simplifying structure of a movable part, lowering its weight, and precisely detecting a displacement position of a contact part. SOLUTION: A sensor body part 300 constituting this displacement sensor 100 is provided with a support plate 320 supporting a measurement element 200 movably, a reflection mirror 410 attached to the measurement element 200 and provided with a standard reflection face 411, a reference reflection plate 420 fixed to a predetermined position and provided with a reference face 421, a light source 431 emitting light flux, a photograph element 441 photographing an optical image reflected by the standard reflection face 411 and the reference reflection face 521 to be overlapped to each other, and a computing operation means 450 recognizing intensity distribution information about an intensity distribution of interference fringe generated by overlapping of reflected light from the standard reflection face 411 and that from the reference reflection face 421 based on the photographed optical image and calculating a displacement position of a contact part 211 based on the intensity distribution information. COPYRIGHT: (C)2007,JPO&INPIT
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